The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
- True in-line design and easy installation
- Fits in place of standard .25 in. VCR Gasket
- Available in 316L or Hastelloy C-22
- Gasket material Nickel 200
- Broad compatibility with process gases
- Low differential pressure
- All metal construction
- Dried with high purity nitrogen
- Cleanroom packaged
- No particle contribution above background
- No housing required
- Retrofit of existing panels without reconfiguring of systems
- Zero displacement
- Protection for regulators and MFCs
| Materials | Medium | 316L Stainless Steel or Hastelloy C-22 | |
| Gasket | Nickel 200 | ||
| Removal Rating | ≥ 0.4 μm | ||
| Recommended Flow Range | 0-10 SCFM / 0-280 slpm | ||
| Maximum Operating Temperature | Non-Corrosive Gases | 840 °F / 450 °C | |
| Corrosive Gases | 70 °F / 21 °C | ||
| Maximum Differential Pressure | 316L Stainless Steel | 400 psid @ 840 °F / 27 bar @ 450 °C 750 psid @ 100 °F / 52 bar @ 38 °C |
|
| Hastelloy C-22 | 500 psid @ 100 °F / 34 bar @ 38 °C | ||
Pressure Drop vs. Gas Flow Rate
Accessories and Spare Parts
Process gas filtration
Dimensions
| Part Number | Material of Construction | Fitting Type |
| CNL3004VNG4 | 316L Stainless Steel Media, Nickel 200 Gasket | 1⁄4 in. VCR |
| CNC3004VNG4R | Hastelloy C-22 Media, Nickel 200 Gasket | 1⁄4 in. VCR |
Unit conversion: 1 bar = 100 kilopascals
Semiconductor
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