Pall's Gaskleen® Top Mount (TM) filter assemblies are designed for 1.5 nanometer filtration of semiconductor process gases. The top mount filter is ideally suited for integrated gas delivery systems, providing easy access and changeout.
- 316L stainless steel housing
- State-of-the-art filter medium
- High temperature and pressure capabilities.
- Excellent gas displacement and desorption characteristics
- 100 % helium leak tested
- Manufactured and packaged in a cleanroom environment
Materials of Construction
| Filter Medium | GTMF1013CC4 : 316L stainless steel GTMF3700CC4 : 316L stainless steel GTMN1013CC4 : Nickel GTMP3101CC4 : PTFE |
| Internal Surface Finish | ≤ 0.13 μm / 5 μin Ra |
| Housing | 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked. |
| Internal housing surface chmistry | Cr:Fe (1:1) chromium-enriched |
| Core and end caps (GTMP3101CC4) |
PFA |
| O-ring (GTMP3101CC4) |
FEP encapsulated fluorocarbon |
| Removal Rating | 1.5 nm |
| Particle Removal Characteristics | GTMF1013CC4 : 109 particle reduction up to 5 slpm GTMN1013CC4 : 109 particle reduction up to 3 slpm GTMP3101CC4 : 109 particle reduction up to 75 slpm GTMF3700CC4 : 109 particle reduction up to 100 slpm |
| Connections | C-seal, 1 1/8" interface |
| Leak Rating | 100% helium leak tested to 10-9 atm cm3 / sec Design validated to 10-11 atm cm3 / sec |
| Design Pressure (Maximum Operating Pressure) |
3.5 MPa @ 100 ºC / 500 psig @ 212 ºF |
| Maximum Allowable Differential Pressure | GTMF1013CC4 / GTMN1013CC4 / GTMF3700CC4 0.7 MPa @ 38 ºC / 100 psid @ 100 ºF GTMP3101CC4 0.6 MPa @ 121 ºC / 80 psid @ 250 ºF |
Air Flow vs. Pressure Drop
GTMF1013CC4
GTMN1013CC4
GTMP3101CC4
GTMF3700CC4
Filter Capsules
Process gas filtration
Dimensions
| Part Number | Description | Height (mm / in.) |
Shell Diameter (mm / in.) |
Design Flow Rate (slpm) |
| GTMF1013CC4 | All 316 L stainless steel | 35.6 / 1.4 | 22.1 / 0.87 | 0 – 5 |
| GTMN1013CC4 | 316 L stainless steel housing Nickel filter | 35.6 / 1.4 | 22.1 / 0.87 | 0 – 3 |
| GTMP3101CC4 | 316 L stainless steel housing All fluoro-polymer element | 74.5 / 2.93 | 21.7 / 0.85 | 0 – 75 |
| GTMF3700CC4 | All 316 L stainless steel | 74.5 / 2.93 | 21.7 / 0.85 | 0 - 100 |
Semiconductor
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