描述
The Gasket-Sert PSP filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
- True in-line design and easy installation
- Alignment retainer for ease of installation
- Fits in place of standard 1⁄4 in. VCR1 or 1⁄4 in. UJR compatible gasket
- Broad compatibility with process gases
- Low differential pressure
- All 316L stainless steel construction
- Dried with high purity nitrogen
- Cleanroom packaged
- No hold-up volume
- No particle contribution above background
- No housing required
- Retrofit of existing panels without reconfiguring of systems
- Zero displacement
- Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.
规格
Materials
- Medium and gasket: 316L stainless steel
Removal Rating
- ≥ 0.4 μm at 99.9% efficiency
Operating Conditions
- Recommended flow range: 0-28 slpm / 0-1 scfm
- Maximum operating temperature:
- Inert gases: 300 °C / 572 °F
- Anhydrous corrosive gases: 30 °C / 86 °F
- Maximum differential pressure:
- Inside out:
690 kPa @ 20 °C / 100 psid @ 68 °F - Outside in:
1380 kPa @ 20 °C / 200 psid @ 68 °F
- Inside out:
性能
Pressure Drop vs. Gas Flow Rate
类型
Filter Cartridges
应用
Process gas filtration, Process gas filtration
附加信息
Dimensions
订购信息
| Part Number | Material of Construction | Fitting Type |
| CNF1104USG4 | All 316L stainless steel | 1⁄4 in. VCR or 1⁄4 in. UJR |
Unit conversion: 1 bar = 100 kilopascals
分类信息
Photovoltaics, Semiconductor
检查
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