The Ultipleat P-Nylon filter is recommended specifically for bulk filtration of photoresists, solvents, TMAH-based developers and other chemicals, that are compatible with nylon 6,6 and High Density Polyethylene (HDPE). The filter design incorporates the latest advance in Pall filtration technology: the crescent shaped Ultipleat® filter configuration.
- Naturally hydrophilic
- Quick venting
- Wide range of configurations
- High flow rates
- Integrity testable
- Low extractables
- Manufactured in a cleanroom environment
- 100% integrity tested
Materials
- Medium: Hydrophilic nylon 6,6
- Core, cage, and end caps: High Density Polyethylene (HDPE)
- Support and drainage: High Density Polyethylene (HDPE)
- O-ring options: Fluoroelastomer and FEP encapsulated elastomer
Removal Ratings
- 0.1 μm, 40 nm, 20 nm
Filter Areas
- 0.1 μm UNI: 0.93 m2 / 10 ft2 per 10 in.
- 40 nm UND: 1.2 m2 / 13 ft2 per 10 in.
- 20 nm UNM: 1.4 m2 / 15 ft2 per 10 in.
Configurations
- Nominal length:
- 254 mm / 10 in.
- 508 mm / 20 in.
- 762 mm / 30 in.
- 1016 mm / 40 in.
- Diameter: 70 mm / 2.75 in.
- O-ring size / end caps:
- Code 3: 222 double O-ring / flat end
- Code 8: 222 double O-ring / finned end
- Code 7: 226 double O-ring bayonet lock / finned end
- MR Code 3: 222 double O-ring / flat end designed to retrofit Code 0 elements
Operating Conditions
- Maximum operating temperature: 50 °C / 120 °F
- Maximum forward / reverse differential pressure: 275 kPa @ 20 °C / 40 psid @ 68 °F
Recommended Applications
- Anti-reflective coatings
- Up to 3% TMAH-based developers
- i-line, 248 nm, and 193 nm photoresists
- Solvents
Pressure Drop vs. Liquid Flow Rate
Filter Cartridges
Photolithography
| Part Number1 | Removal Rating | Nominal Length (mm / in.) | Configuration Code | O-Ring Material2 |
| ABD1UNI3EH1 | 0.1 μm | 254 / 10 | 3 | FEP encapsulated elastomer |
| ABD1UNI8EH1 | 0.1 μm | 254 / 10 | 8 | FEP encapsulated elastomer |
| MRD1UNI3EH1 | 0.1 μm | 254 / 10 | 3 | FEP encapsulated elastomer |
| ABD1UND3EH1 | 40 nm | 254 / 10 | 3 | FEP encapsulated elastomer |
| ABD1UND8EH1 | 40 nm | 254 / 10 | 8 | FEP encapsulated elastomer |
| ABD1UNM3EH1 | 20 nm | 254 / 10 | 3 | FEP encapsulated elastomer |
| ABD1UNM8EH1 | 20 nm | 254 / 10 | 8 | FEP encapsulated elastomer |
1The above filter configurations are also available in 508 mm / 20 in., 762 mm / 30 in., and 1016 mm / 40 in. lengths. These can be ordered by changing the fourth digit in the part number to a 2, 3, or 4 respectively.
2 Other O-ring materials are available.
Unit conversion: 1 bar = 100 kilopascals
Semiconductor
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