FlexBowl™ Filter Housings

The FlexBowl filter housing has been specifically designed for the challenging ultrapure chemical applications used in semiconductor manufacture. It meets Pall’s same high standards for cleanliness, purity, compatibility, and mechanical strength as its MegaplastTM housings. The housing’s extremely flexible design allows for easier and safer filter handling, and reduces cost of ownership.

The key to the flexibility of the FlexBowl filter housing design is a universal manifold, which can accommodate a reusable housing. This design connects easily to the manifold with a quarter turn of the locking ring.

Housings are available in 4 in (102 mm), 10 in (254 mm), and 20 in (508 mm) sizes. The 10 in (254 mm) housing is designed to fit standard 10 in (254 mm) filter cartridges with a diameter of up to 3.25 in (82.5 mm) and a nominal length of 10 in (254 mm). Standard semiconductor industry inlet and outlet connection fittings for this system are also offered in a variety of different sizes and styles.

• Filter cartridge can be securely sealed in the bowl before approaching the tool.
• Housing accepts standard length cartridges without the need for special adapters that add cost and may impede fluid flow and cleaning.
• Assembled housing and cartridge unit is inserted into the manifold and securely sealed with a quarter turn of the manifold locking ring using a spanner wrench.¹ It can be disengaged from the manifold quickly with a quarter turn of the locking ring.
• Cartridge and bowl are removed as a unit, requiring minimal space in the tool.
• Cartridge, still sealed within the housing, can be safely transported to an appropriate area for changeout, with minimal exposure to chemicals at the tool.

¹ Part number ACS0655AA